Gradient Dryer - Gradient Technology

Gradient Dryer

Gradient Technology, Inc, has introduced The Gradient Dryer�, a batch surface tension gradient dryer that will dry a variety of substrates including III-V Semiconductors, MEMS, solar Cells, fuel cells as well as ICs. The Gradient Dryer� module is an option on the industry-proven Gradient Technology, Inc, wet process stations that serves multiple cleaning applications.
	The Gradient Dryer�

Gradient Technology, Inc, Key Advantages
Feature	Impact
Next generation system	State of art electronics Safety interlocks
Flexible, intuitive, recipe driven software	MFC's and all flows are under software control
Wafer and process chamber w/o moving parts	No particle generation No substrate breakage
Tank and lid design Flexible air nozzle configuration	Optimized based on wafer size, type, and cassette type
Patented surface tension gradient effect	Use Only 10ml IPA per batch No disposal required Unmatched cleaning Watermark free
High aspect ratio features dried	Significant device impact
New generation software 100 recipe capacity	Complete flexibility Significant timesavings Reduced set-up
Simulated process visibility	Elimination of pilot error
Ergonomic design	Capture of all vapors
Custom experience based flexible fixturing	Optimum quality drying
Elimination of metal corrosion sources	Closed lid eliminates light Static discharge elements in design Essentially no remaining water on substrates Cool, room temperature process
Local support Process Engineering Service	Applications support Local customization Response quality, time
COO Optimized	Multiple carriers Form-fit with SRD's Expandability to 8" Reconfigurable from dual 4" to single 8"
Maintainability	Access to subsystems both front and back Quick access to electrical cabinet Separation of key subsystems System maintenance access through software